Circuits and Systems MEMS Silicon Oscillating Accelerometers and Readout Circuits (Hardcover)

Circuits and Systems MEMS Silicon Oscillating Accelerometers and Readout Circuits (Hardcover)

Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA) also referred to as...


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